@article{赵靓:82, author = {赵靓}, title = { 泊松亮斑的模拟仿真研究 }, publisher = {大学物理实验}, year = {2020}, journal = {大学物理实验}, volume = {33}, number = {1}, eid = {82}, numpages = {2}, pages = {82}, keywords = {

泊松亮斑;菲涅尔衍射;Matlab;光刻

}, url = {http://dawushiyan.jlict.edu.cn/CN/abstract/article_727.shtml}, doi = {10.14139/j.cnki.cn22-1228.2020.01.020} }